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Phase Feedback Active Stabilisation Of A Multiplexed Fibre Interferometer

By Haydn Martin and Xiang Jiang

Abstract

Current optical technologies for surface measurement such as white light scanning\ud interferometry (WLSI) can produce sub-nanometric resolution areal height information.\ud However, the sensitivity of such devices to external vibration coupled with their bulky\ud nature requires that any workpiece be removed from the manufacturing line in order for\ud measurement to be taken place.\ud Clearly, a production line mountable, vibration stabilised device would provide benefits in\ud manufacturing throughput and help reduce scrap rates. The multiplexed fibre\ud interferometer (MFI) aims to provide this capability for high precision surfaces with submicron\ud form deviation

Topics: T1, TA
OAI identifier: oai:eprints.hud.ac.uk:5228

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Citations

  1. (2009). Xiang Phase Feedback Active Stabilisation Of A Multiplexed Fibre Interferometer Original Citation Martin, Haydn and Jiang,

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