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Surface Profile Height Measurement Using Optical Interferometry Method

By Hussam Muhamedsalih, Xiang Jiang and Kaiwei Wang


Interferometer is one of the methods that are used for measuring surface profile with high accuracy reach to the order of 1/1000 of the wavelength of the light. The accuracy in a given interferomter depends on many factors such as the light source properties and environmental mechanical vibration. This poster illustrates a method to increase the accuracy of Linnik interferometer for nano-scale measurements

Topics: T1, TA
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