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Cleaning of structured templates from nanoparticle accumulation using silicone

By S. Merzsch, H.S. Wasisto, A. Waag, I. Kirsch, E. Uhde, T. Salthammer and E. Peiner


Polydimethylsiloxan (PDMS) turned out to be a simple and cost efficient material for the removal of nanoparticles from patterned surfaces. After molding the particle-laden surface using liquid silicone, surface cleaning is realized by curing the PDMS comprising the encapsulated particles and subsequent removal. The method is proven for silicon, SiO 2 and gold surfaces occupied by carbon and Polytetrafluorethylen (PTFE or Teflon) particles. Samples up to 2 inch wafers were successfully cleaned. The effect of PDMS on the surface energy is verified by contact angle measurements showing a clear change in wetting for H 2O. This effect is abolished by oxygen plasma and HF-Dip

Year: 2012
DOI identifier: 10.1007/s00542-011-1379-7
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Provided by: Fraunhofer-ePrints
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