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Influence of platinum bottom electrodes on the piezoelectric performance of PZT thin films hot sputtered in a high volume production tool

By D. Kaden, H.-J. Quenzer, M. Kratzer, L. Castaldi, B. Wagner, B. Heinz and R. Mamazza
Year: 2012
DOI identifier: 10.1557/opl.2012.450
OAI identifier: oai:fraunhofer.de:N-214541
Provided by: Fraunhofer-ePrints
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