The potential of a magnetically enhanced hollow cathode arc source for high rate PECVD processes has been evaluated for amorphous hydrogenated carbon film (a-C:H) deposition from acetylene precursor gas. The argon-acetylene plasma has been characterized by energy-resolved mass spectrometry revealing a large variety of dissociation and polymerization products as well as their kinetic energy distributions, which are related to the spatial distribution of ion generation. a-C:H layers have been deposited on flat substrates with rates of up to 1 µm/min. Depending on the deposition conditions, polymeric, graphitic, and diamond-like carbon films with a maximum nanoindentation hardness of 18.2 GPa have been produced and analyzed by Raman spectroscopy, scanning electron microscopy, elastic recoil detection analysis and Rutherford backscattering spectrometry
To submit an update or takedown request for this paper, please submit an Update/Correction/Removal Request.