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Biaxial resonant 7mm-MEMS mirror for automotive LIDAR application

By U. Hofmann, F. Senger, F. Soerensen, V. Stenchly, B. Jensen and J. Janes


A resonant biaxial comb-actuated 7mm-MEMS scanning mirror with tripod-suspension is developed to provide omnidirectional scanning in an automotive time-of-flight LIDAR sensor application. Wafer level vacuum packaging technology is applied to enable circular scanning at 550Hz at large tilt angle

Year: 2012
DOI identifier: 10.1109/OMEMS.2012.6318847
OAI identifier:
Provided by: Fraunhofer-ePrints
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