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The development path of electrostatic resonant to electrostatic quasistatic driven micro scanning mirrors

By Jan Grahman, Denis Jung, David Kallweit, Thilo Sandner, Thomas Graßhoff and Harald Schenk
Year: 2012
OAI identifier: oai:fraunhofer.de:N-229171
Provided by: Fraunhofer-ePrints
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