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Evaluation of sputtered Pd76Cu6Si18 metallic glass for MEMS application

By K. Vogel, M. Wiemer, T. Gessner, J. Vogel, Y.-C. Lin, Y.-C. Tsai, M. Esashi and S. Tanaka
Year: 2015
OAI identifier: oai:fraunhofer.de:N-356404
Provided by: Fraunhofer-ePrints
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