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4H-SiCにおける結晶欠陥の微細構造とデバイス特性への影響に関する研究

By 恩田 正一

Abstract

筑波大学 (University of Tsukuba)201

Year: 2013
OAI identifier: oai:tsukuba.repo.nii.ac.jp:00030993
Provided by: Tsukuba Repository

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