Characterization of microcrystalline Si films by MeV ion scattering techniques

By Bohne W., Röhrich J., Selle B., Birkholz M., Fenske F., Fuhs W., Platen Schwarzkopf J. and Reinig P

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Publisher: 'The Materials Research Society of Japan'

Year: 2001

OAI identifier: oai:helmholtz.HZB:-1663

Provided by: HZB Repository

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