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Characterization of microcrystalline Si films by MeV ion scattering techniques

By Bohne W., Röhrich J., Selle B., Birkholz M., Fenske F., Fuhs W., Platen Schwarzkopf J. and Reinig P
Publisher: 'The Materials Research Society of Japan'
Year: 2001
OAI identifier: oai:helmholtz.HZB:-1663
Provided by: HZB Repository
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