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Влияние содержания алюминия на свойства покрытий на основе Al-Si-N

Abstract

The transparent coatings on the basis of Al-Si-N system with high and low Al content were prepared by impulse magnetron sputtering method. Structural-phase state of the two types of coatings was examined by X-ray analysis. The microhardness, the elastic modulus and the coefficient of elastic recovery were determined by nanoindentation method. Also the optical transmission was measured for all types of samples

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11683/19078oai:earchive.tpu.ru:11683/19078
Last time updated on November 12, 2016

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