A comparison between the RF performance of vertical and lateral power MOSFETs is presented. The role of each parasitic parameter in the assessment of the power gain, 1-dB compression point, efficiency, stability, and output matching is evaluated quantitatively using new analytical expressions derived from a ten-element model. This study reveals that the contribution of the parasitic parameter on degradation of performance depends upon the specific technology and generic perceptions of source inductance and feedback capacitance in VDMOS degradation may not always hold. This conclusion is supported by a detailed analysis of three devices of the same power rating from three different commercial vendors. A methodology for optimizing a device technology, specifically for RF performance and power amplifier performance is demonstrated
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