oaioai:scholarbank.nus.edu.sg:10635/82627

Low substrate temperature fabrication of high-performance metal oxide thin-film by magnetron sputtering with target self-heating

Abstract

10.1063/1.4795763Applied Physics Letters10211-APPL

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oaioai:scholarbank.nus.edu.sg:10635/82627Last time updated on 11/9/2016

This paper was published in ScholarBank@NUS.

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