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The study of the solid acceptance angle in quantitative X-ray photoelectron spectroscopy.

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by Ka-wai Wong.Thesis (M.Phil.)--Chinese University of Hong Kong, 1995.Includes bibliographical references (leaves 106-109).TABLE OF CONTENTS --- p.iABSTRACT --- p.vLIST OF FIGURES --- p.viLIST OF TABLES --- p.xiLIST OF ABBREVIATIONS --- p.xChapter Chapter 1 --- Research Background --- p.1Chapter 1.1 --- Introduction --- p.1Chapter 1.2 --- The effect of solid acceptance angle --- p.2Chapter 1.3 --- Research goals --- p.4Chapter 1.3.1 --- Determination of the electron spectrometer transmission function --- p.4Chapter 1.3.2 --- Novel depth profiling technique by adjusting the solid acceptance angle --- p.6Chapter 1.3.3 --- Correction to conventional ARXPS --- p.8Chapter 1.4 --- Thesis Structure --- p.8Chapter Chapter 2 --- Fundamentals of X-ray Photoelectron Spectroscopy --- p.9Chapter 2.1 --- Introduction --- p.9Chapter 2.2 --- X-ray Photoelectron Spectroscopy (XPS) --- p.9Chapter 2.2.1 --- Basic principles --- p.9Chapter 2.2.2 --- Surface sensitivity --- p.11Chapter 2.2.3 --- A typical XPS spectrum --- p.13Chapter 2.3 --- Qualitative analysis --- p.16Chapter 2.3.1 --- Binding energy --- p.16Chapter 2.3.2 --- Chemical state information --- p.17Chapter 2.4 --- Quantitative analysis --- p.20Chapter 2.4.1 --- Factors affecting intensity --- p.20Chapter 2.4.2 --- Homogeneous materials --- p.22Chapter 2.4.3 --- Layer structure --- p.23Chapter Chapter 3 --- Instrumentation --- p.26Chapter 3.1 --- XPS spectrometer --- p.26Chapter 3.1.1 --- Magnetic immersion lens system --- p.26Chapter 3.1.2 --- Tunable iris --- p.29Chapter 3.1.3 --- Scan plates --- p.29Chapter 3.1.4 --- Input lens aperture --- p.32Chapter 3.2 --- Calibration of the iris --- p.32Chapter 3.3 --- Applications --- p.35Chapter 3.3.1 --- Two dimensional XPS imaging --- p.35Chapter 3.3.2 --- ARXPS --- p.37Chapter 3.4 --- Summary --- p.37Chapter Chapter 4 --- Determination of electron spectrometer transmission function --- p.38Chapter 4.1 --- Introduction --- p.38Chapter 4.2 --- Traditional method of determination --- p.39Chapter 4.3 --- Methodology of the novel approach --- p.40Chapter 4.4 --- Calculation Procedures and Results --- p.48Chapter 4.5 --- Results and Discussions --- p.50Chapter 4.6 --- Conclusions --- p.57Chapter Chapter 5 --- "Depth Profiling by Adjusting the Solid Acceptance Angle: a Starting Point to “ Three-Dimensional Imaging""" --- p.59Chapter 5.1 --- Introduction --- p.59Chapter 5.2 --- Theoretical Background --- p.60Chapter 5.2.1 --- Quantification of Intensity --- p.60Chapter 5.3 --- Experimental --- p.69Chapter 5.3.1 --- Operation --- p.69Chapter 5.3.2 --- Calibration of iris --- p.70Chapter 5.3.3 --- Novel depth profile by adjusting the solid acceptance angle --- p.71Chapter 5.4 --- Results and Discussions --- p.71Chapter 5.4.1 --- Depth Profiles --- p.71Chapter 5.4.2 --- "Concept of ""Three-Dimensional XPS Imaging""" --- p.72Chapter 5.5 --- Conclusions --- p.76Chapter Chapter 6 --- Correction to Quantitative X-ray Photoelectron Spectroscopy with Consideration of the Solid Acceptance Angle --- p.79Chapter 6.1 --- Introduction --- p.79Chapter 6.2 --- The effect of the solid acceptance angle --- p.80Chapter 6.3 --- Theoretical Background --- p.83Chapter 6.4 --- Results and Discussions --- p.87Chapter 6.4.1 --- Homogeneous Sample --- p.87Chapter 6.4.2 --- Layer structure --- p.90Chapter 6.4.3 --- Simulation plots and further investigation --- p.92Chapter 6.5 --- Conclusions --- p.101Chapter Chapter 7 --- Conclusion --- p.103Acknowledgment --- p.105References --- p.10

Topics: Surfaces (Technology)--Analysis, Photoelectron spectroscopy, X-ray spectroscopy
Publisher: Chinese University of Hong Kong
Year: 1995
OAI identifier: oai:cuhk-dr:cuhk_320579

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