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High precision angle calibration for spherical measurement systems

By David G. Martin

Abstract

The European Synchrotron Radiation Facility (ESRF) located in Grenoble, France is a joint facility supported and shared by 19 European countries. It operates the most powerful synchrotron radiation source in Europe. Synchrotron radiation sources address many important questions in modern science and technology. They can be compared to “super microscopes”, revealing invaluable information in numerous fields of diverse research such as physics, medicine, biology, geophysics and archaeology. For the ESRF accelerators and beam lines to work correctly, alignment is of critical importance. Alignment tolerances are typically much less than one millimetre and often in the order of several micrometers over the 844 m ESRF storage ring circumference. To help maintain these tolerances, the ESRF has, and continues to develop calibration techniques for high precision spherical measurement system (SMS) instruments. SMSs are a family of instruments comprising automated total stations (theodolites equipped with distance meters), referred to here as robotic total stations (RTSs); and laser trackers (LTs). The ESRF has a modern distance meter calibration bench (DCB) used for the calibration of SMS electronic distance meters. At the limit of distance meter precision, the only way to improve positional uncertainty in the ESRF alignment is to improve the angle measuring capacity of these instruments. To this end, the horizontal circle comparator (HCC) and the vertical circle comparator (VCC) have been developed. Specifically, the HCC and VCC are used to calibrate the horizontal and vertical circle readings of SMS instruments under their natural working conditions. Combined with the DCB, the HCC and VCC provide a full calibration suite for SMS instruments. This thesis presents their development, functionality and in depth uncertainty evaluation. Several unique challenges are addressed in this work. The first is the development and characterization of the linked encoders configuration (LEC). This system, based on two continuously rotating angle encoders, is designed improve performance by eliminating residual encoder errors. The LEC can measure angle displacements with an estimated uncertainty of at least 0.044 arc seconds. Its uncertainty is presently limited by the instrumentation used to evaluate it. Secondly, in depth investigation has lead to the discovery of previously undocumented error-motion effects in ultra-precision angle calibration. Finally, methods for rigorous characterisation and extraction of rotary table error motions and their uncertainty evaluation using techniques not previously discussed in the literature have been developed

Topics: TK, QC
OAI identifier: oai:wrap.warwick.ac.uk:2775

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  1. 17123 Optics and optical instruments - Field procedures for testing geodetic and surveying instruments doi
  2. (2001). 17123-3:2001(E) Optics and optical instruments - Field procedures for testing geodetic and surveying instruments Part 3: Theodolites. doi
  3. 9001: Quality management systems — Requirements. Third edition ed. 2000: International Organization for Standardization. doi
  4. (1991). A history of mathematics. 2nd ed. doi
  5. (1989). A history of pi (pi). doi
  6. (2007). A Modern Calibration Bench: Calibrating Survey Instruments.
  7. (1997). A Multi-Point Method for Spindle Error Motion Measurement. CIRP, doi
  8. A multipoint method for spindle error motion measurement. doi
  9. (1990). A new method of theodolite calibration.
  10. A novel technique for calibration of polygon angles with non-integer subdivision of indexing table. doi
  11. (2002). A reply to "Definitions of the units radian, neper, bel and decibel" doi
  12. A Solution to Atmospherically Induced Problems in Very High-Accuracy Alignment and Leveling. doi
  13. (2004). Acoustic method for determination of the effective temperature and refractive index of air in accurate length interferometry. Optical Engineering, doi
  14. (2008). Affine Transformation.
  15. (2002). Agilent 10770A Angular Interferometer with Agilent 10771A Angular Reflector,
  16. An Advanced Angle Metrology System. doi
  17. (1993). An introduction to the bootstrap. Monographs on statistics and applied probability. doi
  18. (2005). An outline of supplement 1 to the guide to the expression of uncertainty in measurement on numerical methods for the propagation of distributions. Measurement Techniques, doi
  19. Analyse des relevés topographiques de l’ESRF,
  20. (1997). and IEEE Industrial Electronics Society., Capacitive sensors : design and applications.
  21. Angle Encoders. [WWW] [cited; Technical documentation pertaining to the RON 905 operation principle].
  22. Angle standards and their calibration, doi
  23. (1986). Application of Capacitance Techniques in Sensor Design. doi
  24. (1967). Application of the conformal theory of refraction. Zeitschrift fur Vermessungswesen,
  25. (1998). Applications of x-ray interferometer-generated Moire patterns. Nanotechnology, doi
  26. (2002). Applied functional data analysis : methods and case studies. Springer series in statistics. doi
  27. (2005). Attempts to include uncorrected bias in the measurement uncertainty. Talanta, doi
  28. (2006). Basic Construction of the Flat Angle Calibration Test Bench for Geodetic Instruments. Geodesy and Cartography (Geodezija ir kartografija),
  29. (2004). Bayesian estimation methods in metrology.
  30. (2008). calcul incertitude edition 8,
  31. (2003). Calculating and Converting between Common Vapour Measures
  32. (2003). Calibration of high-resolution electronic autocollimators against an angle comparator. Metrologia, doi
  33. (2006). Calibration of Total Station Instruments at the European Synchrotron Radiation Facility.
  34. (2006). Calibration of Total Stations Instruments at the ESRF
  35. (2006). Capacitive Sensor Operation and Optimisation TechNote LT03-0020. Volume,
  36. Chaîne de mesure dimensionnelle capacitive à sortie linéaire.,
  37. Classical dynamics of particles and systems. doi
  38. Contribution a l'Evaluation de Angles - Conception, Realisation et Validation dún Plateau Pivotant de Tres Haute Precision : Vers une Nouvelle Reference Angulaire Nationale,
  39. (2005). Correcting capacitive displacement measurements in metrology applications with cylindrical artifacts. doi
  40. (1973). Design and Some Applications of Sensitive Capacitance Micrometers. doi
  41. (1989). Design Considerations in Multiprobe Roundness Measurement.
  42. Development of a Dispersometer for the Implementation into HighAccuracy Direction Measurement Systems,
  43. (2005). Differing angles on angle. doi
  44. (1997). Dynamic angle measurement by means of a ring laser. Metrologia, doi
  45. (2008). e-Handbook of Statistical Methods,
  46. (2003). Effect of non-significant proportional bias in the final measurement uncertainty. Analyst, doi
  47. Ein interferometrisched Verfahren zur Bestimmung von Strichverbesserungen an eingebauten Theodolitteilkreissn,
  48. (1991). Electromagnetic distance measurement. 3rd ed ed.
  49. (1996). Electronic Distance Measurement- An Introduction. 4th ed. doi
  50. Electronic Surveying Instruments: A Review of Principles, Problems and Procedures.
  51. (1988). Electronic Transducers for Industrial Measurement of Low Value Capacitances. doi
  52. (1999). European co-operation for Accreditation. doi
  53. (2006). Evaluation of measurement data — Supplement 1 to the “Guide to the expression of uncertainty
  54. (1998). Evaluation of the uncertainty associated with a measurement result not corrected for systematic effects. doi
  55. (2006). Evolution of the 'Guide to the Expression of Uncertainty in Measurement'. Metrologia, doi
  56. (1993). Four-point method of roundness and spindle error motion measurement. CIRP, doi
  57. (1997). Functional data analysis. Springer series in statistics. doi
  58. Galileo high-resolution encoder system, in doi
  59. (1988). Goniometer with Continuously Rotating Gratings for Use as an Angle Standard. Precision Engineering-Journal of the American Society for Precision Engineering, doi
  60. Guide to the Expression of Uncertainty
  61. (1997). Guidelines for expressing the uncertainty of measurement results containing uncorrected bias. doi
  62. (2008). High precision angle calibration of robotic total stations and laser trackers. doi
  63. (1994). High-Resolution of Rotary Encoder Analog Quadrature Signals. doi
  64. (1976). Improving the Accuracy of Roundness Measurement. doi
  65. Inclinomètre à niveaux hydrostatiques de haute résolution en géophysique / High Resolution Water-Tube Tiltmeter in Geophysics,
  66. Instrumentation and Calibration at the ESRF.
  67. (2004). Instrumentation and Survey Networks at the ESRF.
  68. Intercomparaison des méthod de mesur dans le domaine de ls Métrologie Tridimensionnelle par
  69. (1986). Introduction to space dynamics. Dover books on engineering.
  70. (2005). La Mesure des Angles au BNM-LNE -Cretion d'une Nouvelle Reference de Mesure Angulaire.
  71. (2002). Large-scale metrology - An update. doi
  72. (2008). Laser Tracker Test Facility at SLAC -
  73. (1986). Measurement of angle
  74. Mesure de distance par capteur capacitif et électronique numérique,
  75. (1999). Mise au Point d'une methode d'étalonnage de théodolites.
  76. (1997). Modeling and error analysis for assessing spindle radial error motions. doi
  77. (2008). Modulo operation
  78. Multiple view geometry in computer vision. 2nd ed. 2003, Cambridge: doi
  79. (2006). Nanometer-level comparison of three spindle error motion separation techniques. doi
  80. (2006). Performance Evaluation of Laser-Based Spherical Coordinate Measurement Systems.
  81. (1999). Practice for non-contacting CMMs :
  82. Precession and nutation of a gyroscope. doi
  83. (2008). Precision Spindle Metrology. doi
  84. (1996). Refractive index of air: New equations for the visible and near infrared. Applied Optics, doi
  85. Refractive index of air. 2. Group index. doi
  86. (1999). Refractive Indices of Light, Infrared and Radio Waves in the Atmosphere,
  87. (1996). Self Calibration: Reversal, Redundancy, Error Separation, doi
  88. (1996). Self Calibration: Reversal, Redundancy, Error Separation, and 'Absolute Testing'. Annals of the CIRP, doi
  89. (2005). Self-calibratable rotary encoder, doi
  90. (2008). Self-calibration of divided circles on the basis of a prime factor algorithm. doi
  91. (2006). Software Specifications for Uncertainty Evaluation,
  92. (2006). Software Support for Metrology Best Practice Guide
  93. (2004). Some Reflections on the Validation and Analysis of HLS Data.
  94. (1976). Some Theoretical Aspects of Error Separation Techniques in Surface Metrology. doi
  95. (2008). Spline Toolbox Users Guide, I. The Mathworks, Editor.
  96. Surveying Instruments. doi
  97. (2008). Synchrotron Radiation Facility. doi
  98. (2005). Techniques for calibrating spindles with nanometer error motion. doi
  99. (2004). The accuracy of angle encoders.
  100. (2005). The concise Oxford dictionary of mathematics. 3rd ed. doi
  101. (2008). The design and application of rotary encoders. Sensor Review, doi
  102. (2001). The elements of statistical learning : data mining, inference, and prediction. Springer series in statistics. doi
  103. The measure of all things : the seven-year odyssey that transformed the world. 2002, London: Little Brown. doi
  104. (2008). The Metre Convention doi
  105. (1939). The Refraction and Dispersion of Air for the Visible Spectrum. The Royal Society Philosphical Transactions Mathematical, Physical and Engineering Sciences, doi
  106. (1966). The Refractive Index of Air. doi
  107. (2005). Treatment of bias in estimating measurement uncertainty. Analyst, doi
  108. (2004). Uncertainties in small-angle measurement systems used to calibrate angle artifacts. doi
  109. Uncertainty characterization for portable variable geometry coordinate measurement systems.
  110. Understanding robust and exploratory data analysis. doi
  111. (2007). United Kingdom Accreditation Service: Feltham,
  112. (2002). Use and Calibration of Ultraprecision Axes of Rotation With Nanometer Level Metrology,
  113. What is a Lock in Amplifier?: Technical Note TN 1000. 2000, Perkin Elmer Instruments: Oak Ridge TN.
  114. (1961). Zur Reduktion eletronisch gemessener Strecken und beobachteter Winkel wegen Refraktion. Osterreichische Zeitschrift fur Vermessungswesen,

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