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Optical quality ZnSe films on silicon for mid-IR waveguides

By Vinita Mittal, James Wilkinson and Ganapathy Senthil Murugan


ZnSe films were deposited on silicon substrates by evaporation and RF-sputtering and compared for their structural, morphological and optical properties. The deposited films were tested as waveguide cladding and the evaporated films showed lower loss

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