Influence of working conditions on the signal level detected by BSE detector

Abstract

This thesis deals with the evaluation of the quality of the signal level of backscattered electrons detected by the scintillation backscattered electron detector depending on the working conditions in low vacuum scanning electron microscope. The theoretical part describes the issue of environmental scanning electron microscopy, the principle of generation the signal and detection of backscattered electrons. The experimental part of the thesis is to measure the properties of the scintillation detector of backscattered electrons. A series of experiments is evaluated the influence of working conditions on the stability and function of the detector of backscattered electron

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National Repository of Grey Literature

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Last time updated on 10/08/2016

This paper was published in National Repository of Grey Literature.

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