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Influence of working conditions on the signal level detected by BSE detector

By Eduard Bednář


This thesis deals with the evaluation of the quality of the signal level of backscattered electrons detected by the scintillation backscattered electron detector depending on the working conditions in low vacuum scanning electron microscope. The theoretical part describes the issue of environmental scanning electron microscopy, the principle of generation the signal and detection of backscattered electrons. The experimental part of the thesis is to measure the properties of the scintillation detector of backscattered electrons. A series of experiments is evaluated the influence of working conditions on the stability and function of the detector of backscattered electron

Topics: zpětně odražené elektrony; vyhodnocování signálu ze stupňů šedi.; nízkovakuový rastrovací elektronový mikroskop; Rastrovací elektronový mikroskop; Everhart – Thornley scintillation detector; scintilační detektor zpětně odražených elektronů; osciloskopická metoda vyhodnocení signálu; Scanning electron microscope; oscilloscope signal evaluation method; Everhart – Thornley scintilační detektor; signal evaluation of grayscale; scintillation detector of backscattered electron; low vacuum scanning electron microscope; poměr signál – šum; signal – noise ratio; backscattered electrons
Publisher: Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií
Year: 2014
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