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MEMS Inertial Sensor

By Juraj Mihaľko


The aim of this master’s thesis is to describe the basic measurement methods of micro-electromechanical inertial sensor, their physical principles and errors. Measurement of inertial sensors is very important for the parameterization of their errors and their subsequent mathematical model by which it is possible to minimize the measurement error impact on inertial navigation. The practical part is dedicated to create automated measurement setup for measurement stability of the offset. Hardware and software from National Instruments is used in measurement chain. The work is next focused on measuring seven inertial sensors based on three different physical principles. In addition to creating measurement setup, we also defined three inertial sensor parameters, describing theoretical behavior of the sensor output

Topics: inertial sensor errors; inertial sensor measurement; accelerometer; MEMS inertial sensor; gyroscope
Publisher: Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií
Year: 2012
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