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Cathode nanostructures in MEMS applications

By Jan Pekárek

Abstract

The main goal of this work is to introduce new carbon structures - carbon nanotubes. The main objective of this work is to take advantage of the unique characteristic of carbon nanotubes to emit electrons at very low supply voltage

Topics: Micro-Electro-Mechanical Systems.; anodické pájení; Fullereny; emise elektrickým polem; tlakový senzor; plasma enhanced chemical vapor deposition; field emission; plazmochemická depozice z plynné fáze; Fullerenes; carbon nanotubes; pressure sensor; anodic bonding; Mikro-Elektro-Mechanické Systémy.; uhlíkové nanotrubice
Publisher: Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií
Year: 2008
OAI identifier: oai:invenio.nusl.cz:217244
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