Skip to main content
Article thumbnail
Location of Repository

Cathode nanostructures in MEMS applications

By Jan Pekárek


The main goal of this work is to introduce new carbon structures - carbon nanotubes. The main objective of this work is to take advantage of the unique characteristic of carbon nanotubes to emit electrons at very low supply voltage

Topics: Micro-Electro-Mechanical Systems.; anodické pájení; Fullereny; emise elektrickým polem; tlakový senzor; plasma enhanced chemical vapor deposition; field emission; plazmochemická depozice z plynné fáze; Fullerenes; carbon nanotubes; pressure sensor; anodic bonding; Mikro-Elektro-Mechanické Systémy.; uhlíkové nanotrubice
Publisher: Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií
Year: 2008
OAI identifier:
Download PDF:
Sorry, we are unable to provide the full text but you may find it at the following location(s):
  • (external link)
  • Suggested articles

    To submit an update or takedown request for this paper, please submit an Update/Correction/Removal Request.