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Study of a selective growth of metals on matrix prepared by AFM nanolithography

By Martin Konečný

Abstract

This bachelor thesis is focused on fabrication of nanostructures with usage of atomic force microscope. The theoretical part refers to basic principles of atomic force microscope and to physical principle of local anodic oxidation. The experimental part is focused on analysis of nanostructures created by local anodic oxidation, measuring of surface potential on prepared nanostructures and on selective growth of metals on matrix prepared by local anodic oxidation

Topics: local anodic oxidation; AFM; LAO; nanolithography; lokální anodická oxidace; nanolitografie; KFM
Publisher: Vysoké učení technické v Brně. Fakulta strojního inženýrství
Year: 2011
OAI identifier: oai:invenio.nusl.cz:212282
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