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Geometric simulation of microfabricated structures

By Robert Michael Harris

Abstract

Robert Michael Harris.Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.Includes bibliographical references (p. 295-302)

Topics: Electrical Engineering and Computer Science
Publisher: Massachusetts Institute of Technology
Year: 1995
OAI identifier: oai:dspace.mit.edu:1721.1/11842
Provided by: DSpace@MIT
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