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Measurement of adhesion and mechanical properties of thin films using microfabricated structures

By Mark George Allen

Abstract

by Mark George Allen.Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1989.Includes bibliographical references (leaves 188-193)

Topics: Chemical Engineering.
Publisher: Massachusetts Institute of Technology
Year: 1989
OAI identifier: oai:dspace.mit.edu:1721.1/14329
Provided by: DSpace@MIT
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