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Effects of radio-frequency power on the properties of carbon thin films prepared by thermal chemical vapor deposition enhanced with remote inductively-coupled-plasma using acetylene/nitrogen mixtures

By Liang-Hsun Lai, Kuan-Chang Wu and Sham-Tsong Shiue
Year: 2015
DOI identifier: 10.1016/j.tsf.2014.02.108
OAI identifier: oai:ir.lib.nchu.edu.tw:11455/86291
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