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Growth evolution of SixNy on the GaN underlayer and its effects on GaN-on-Si (111) heteroepitaxial quality

By Tzu Yu Wang, Sin Liang Ou, Ray Hua Horng and Dong Sing Wuu
Year: 2015
DOI identifier: 10.1039/c3ce42638f
OAI identifier: oai:ir.lib.nchu.edu.tw:11455/86274
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