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Design of low noise pH-ISFET microsensors and integrated suspended inductors with increased quality factor Q.

By Bohuslav Palan and Praha (Czech Republic) Ceske vysoke uceni technicke v Praze

Abstract

ISFETs promise to be important sensors for biomedical applications where low cost, small size and integration with integrated circuits are desirable features. The ISFETs are today commercially available and are employed in pH meters. However, their prices are still higher that glass pH-electrode systems, and commercial ISFETs are manufactured using old specially dedicated technologies, which do not allow integration of interfacing circuits on the same chip. The main effort is concentrated on the pH-ISFET development in a low-cost, unmodified 0,6m CMOS technology. The research includes feasibility study, design, fabrication, and full pH characterization. One of the main aspects is the ISFET encapsulation. More than ten packaging materials are characterized. Several of novel ISFET structures are functional and show promising results. Noise contribution of commercial ISFETs, as well as of our new designed pH-sensors, is studied and measured. The selected CMOS technology offers lower noise properties for our designed ISFETs compared to commercial devices, which is an advantage. Two designed pH sensor interfaces are presented. It is a fully integrated ISFET sensor interface with two measuring sensors having different sensitivities, monolithically integrated on the same Si chip. The second interface circuit is designed for pH-ISFETs based on an organic substrate.Available from STL Prague, CZ / NTK - National Technical LibrarySIGLECZCzech Republi

Topics: 06L - Medical equipment, hospital equipment, medical diagnostic equipment, 09C - Electronic devices, electromechanical devices
Publisher: Praha (Czech Republic) : Ceske vysoke uceni technicke v Praze
Year: 2001
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Provided by: OpenGrey Repository
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