Investigation of special ion irradiation action features on polymer masks in microstructurization processes

Abstract

The work covers the organic resists and high-temperature superconducting (HTSC) ceramic films. The aim of the work is to investigate the ionic-beam etching mechanisms of the organic resists, to develop the methods improving the masking properties of resists, to approve the obtained results in the production processes of structures in the HTSC ceramic films. The ionic-beam etching method of organic resists permitting to explain the earlier known and new experimental results. The possibility to improve the masking properties of resists by means of the ionic implantation has been shown, the technological scheme of making structures in the HTSC ceramic films without degradation of properties of the latters has been developed and investigatedAvailable from VNTIC / VNTIC - Scientific & Technical Information Centre of RussiaSIGLERURussian Federatio