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IMPULSE-PERIODICAL MULTIFUNCTIONAL SOURCES OF IONS ON THE BASE OF A VACUUM ARC AND NON-TRADITIONAL METHODS OF THE IONIC-BEAM-IONIC-PLASMA PROCESSING OF MATERIALS

By Alexander Ilyich Ryabchikov

Abstract

The law investigation of the formation of impulse one- and multicomponent beams of accelerated ions is the aim of the paper as well as the particular feature investigation of their interaction with the solid body surface. As a result the physical model for the control of parameters of impulse ionic beams and plasma flows in sources on the base of a vacuum arc has been created. Models for the obtaining of big concentrations of an alloying admixture at the impulse-periodical implantation have been developed as well as new ionic sources. The measuring-diagnostic complex with the sounding of a surface by a beam of ions of microne sizes has been created. New methods of the impulse-beam, ionic-plasma processing of materials have been represented. Methodologies and plants have been introduced into operation. The paper results may find their field of application in the ionic-beam processing of non-semiconducting materialsAvailable from VNTIC / VNTIC - Scientific & Technical Information Centre of RussiaSIGLERURussian Federatio

Topics: 20K - Solid-state physics, PHYSICS, ELECTRONICS, RADIO ENGINEERING, MECHANICAL ENGINEERING
Year: 1992
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Provided by: OpenGrey Repository
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