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Zusammenfassende Darstellung der Forschungsergebnisse zum Thema Praezisionsantriebe fuer den Mikrometer- und Submikrometerbereich. T. 1

By Chemnitz Technische Univ. (Germany)

Abstract

Conclusion is available from TIB Hannover under shelf mark: F93B1103Available from TIB Hannover: F93B1105 / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEBundesministerium fuer Forschung und Technologie (BMFT), Bonn (Germany)DEGerman

Topics: 20K - Solid-state physics, 09C - Electronic devices, electromechanical devices, PREZOELECTRICITY, PROPULSION, FOCUSSING, MICROELECTRONICS, VOLTAGE SOURCE, BEARINGS, DYNAMICS, NONLINEAR POBLEMS, DAMPING
Year: 1991
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Provided by: OpenGrey Repository
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