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Ein Beitrag zur Untersuchung der Elektronenstreuung und des Proximityeffektes an den Raendern inhomogener Strukturen bei der Elektronenstrahldirektbelichtung

By B. Mueller


SIGLETIB Hannover: DR 7341 / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekDEGerman

Topics: 100 - Energy and power, general
Year: 1989
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Provided by: OpenGrey Repository
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