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Sputtering of polycrystalline metals by inert gas ions of low energy (100–1000 eV)

By C.H. Weijsenfeld, A. Hoogendoorn and M. Koedam
Topics: Natuur- en Sterrenkunde
Year: 1961
OAI identifier: oai:dspace.library.uu.nl:1874/18296
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