Article thumbnail

Modeling and experimental deposition behavior during AlGaAs growth : a comparison for the carrier gases N2 and H2

By H. Hardtdegen, A. Kaluza, M. Dauelsberg, P. Kaufmann and L. Kadinski
Year: 2000
OAI identifier:
Download PDF:
Sorry, we are unable to provide the full text but you may find it at the following location(s):
  • (external link)
  • (external link)
  • Suggested articles

    To submit an update or takedown request for this paper, please submit an Update/Correction/Removal Request.