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Low temperature assembly method of microfluidic bio-molecules detection device

By Stéphanie Van Loo, Serguei Stoukatch, Fabrice Axisa, Jacques Destiné, Nancy Van Overstraeten, Denis Flandre, Olivia Lefèvre, Pascal Mertens and 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2012)


We developed a microfluidic device for the detection of bio-molecules. The active part of the device is a biofunctionalized interdigitated capacitive sensor. The microsystem consists of a sensor on silicon chip, a microfluidic channel formed by photo-patternable resist and a plastic cover. We implemented a low temperature packaging process to assemble the sensor and prevent the biological material from degradation

Topics: Assembly, Bonding, Microfluidics, Silicon, Temperature sensors, Wires
Publisher: 'Institute of Electrical and Electronics Engineers (IEEE)'
Year: 2012
DOI identifier: 10.1109/LTB-3D.2012.6238086
OAI identifier:
Provided by: DIAL UCLouvain
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