Low temperature assembly method of microfluidic bio-molecules detection device
We developed a microfluidic device for the detection of bio-molecules. The active part of the device is a biofunctionalized interdigitated capacitive sensor. The microsystem consists of a sensor on silicon chip, a microfluidic channel formed by photo-patternable resist and a plastic cover. We implemented a low temperature packaging process to assemble the sensor and prevent the biological material from degradation
Assembly, Bonding, Microfluidics, Silicon, Temperature sensors, Wires
Publisher: 'Institute of Electrical and Electronics Engineers (IEEE)'
DOI identifier: 10.1109/LTB-3D.2012.6238086
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