10.2493/jjspe.67.70

圧電素子とボイスコイルモータを組み合わせた精密位置決め調整機構

Abstract

[[abstract]]This paper reports about a new actuator combining both a piezoelectric actuator and a voice-coil motor (VCM) for the applications of automatic assembly. A one degree-of-freedom of experimental setup is configured to examine the characteristics of the combined piezo-VCM actuator. The results of fundamental experiments are presented and an analytical model is described. The experimental results show that the proposed actuator can move a target object with step sizes in 10 nanometer-order by utilizing the impact force of a piezoelectric element while maintaining the comparatively long operation range of a VCM. It is shown that the hybrid actuator has attractive practical applications in the field of precision industry

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This paper was published in FirstTech Institutional Repository.

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