Design and preparation of the novel PDC-SiCN wired passive high temperature sensor

Abstract

针对航空发动机高温恶劣环境监测对耐高温传感器的需求,提出采用新型耐高温聚合物先驱体陶瓷(PDC-SiCN陶瓷)为温敏介质材料,制备被动式有线无源; 微波温度传感器,实现温度信息的有线无源传输。以PDC-SiCN陶瓷为填充介质,金属银作为表面层,形成谐振器;以共面波导线和共面天线为传输线,实现; 微波信号的传输;在谐振器的侧面开槽,实现宽频激励信号和谐振信号在传输线和谐振器之间的传输。采用HFSS软件进行结构尺寸的仿真和优化,设计出了满足; 最大传输效率的被动式有线无源PDC-SiCN耐高温温度传感器结构。通过以上结构设计,制备出了有线无源温度传感器。结果表明,所设计传感器的工作频率; 为10.16GHz,依据材料的变化特性该传感器可实现频率在500MHz变化范围内的测量。High temperature sensor is intensive needed in the aspect of monitoring; the harsh temperature environment of aero-engine.In this paper,the wired; passive microwave temperature sensor is prepared based on the novel high; temperature resistant polymer derived ceramic-silicon; carbonitride(PDC-SiCN).This PDC-SiCN acts as temperature sensitive; medium and can realize the wired passive transmission of temperature; information.The resonator of the temperature sensor is formed by the; filling medium PDC-SiCN and surface layer metal silver. The transmission; line is the combination of coplanar waveguide line and coplanar antenna; to realize the transmission of the microwave information.In; addition,slotting in the side of the resonator can realize the; transmission of broadband excitation signal and resonance signal between; the transmission line and resonator.The numerical simulation of the; transmission characteristic of this sensor is conducted by using HFSS; software.Finally, the PDC-SiCN wired passive high temperature sensor; which satisfies the maximum transmission efficiency is designed and; prepared according to the simulated and optimized structure; sizes.Results indicate that the operating frequency of the designed; sensor is 10.16GHz,and it can realize the measurement in the variable; range of 500MHz according to the dielectric temperature characteristic; of the PDC-SiCN materials.国家自然科学基金资助项目; 预研基金资助项