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Femtosecond pulsed laser direct write production of nano- and microfluidic channels

By Joel P. McDonald, Vanita R. Mistry, Katherine E. Ray and Steven M. Yalisove

Abstract

Nano- and microfluidic channels were produced by selectively delaminating 1200 nm1200nm thermally grown oxide films (SiO2)(SiO2) films from Si(100) substrates using a femtosecond pulsed laser. Single pass channels exhibiting bell-like cross sections with widths of 24 μm24μm and heights of 355 nm355nm were directly written at a speed of 1 cm/s1cm∕s, while larger channels (320 μm320μm in width and ∼ 15 μm∼15μm in height) were produced by laterally overlapping single pass channels. The results of an investigation of the interior surfaces of the channels via atomic force microscopy and scanning electron microscopy are presented

Publisher: The American Institute of Physics
Year: 2006
DOI identifier: 10.1063/1.2201620
OAI identifier: oai:deepblue.lib.umich.edu:2027.42/87769

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