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Electron density measurements of argon surface-wave discharges

By M. Peters, J. Asmussen, J. H. Rogers, M. L. Brake and R. Kerber

Abstract

The electron density of microwave-generated surface-wave discharges in argon have been measured using Stark broadening and calculated from the measured wavelengths of the standing surface wave. Results obtained from these two techniques compare well. The electron density varies from 10 13 to 10 14 /cm 3 for pressures ranging from 50 to 800 torr

Publisher: Kluwer Academic Publishers-Plenum Publishers; Plenum Publishing Corporation ; Springer Science+Business Media
Year: 1985
DOI identifier: 10.1007/BF00615124
OAI identifier: oai:deepblue.lib.umich.edu:2027.42/45477
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