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LPCVD-Epitaxie für relaxierte Pufferschichten und vertikale MOS-Feldeffekttransistoren

By Susanne Wickenhäuser
Publisher: Forschungszentrum, Zentralbibliothek
Year: 2000
OAI identifier: oai:publications.rwth-aachen.de:58310
Provided by: RWTH Publications
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