The fabrication, spectroscopic properties, and laser performance of Nd3+-doped Ta2O5 channel waveguide lasers are described. Lasing is obtained at both 1.066µm and 1.375µm with threshold pump powers as low as 2.7mW. The rib waveguides are reactive-ion-etched into Nd:Ta2O5 layers formed by reactive magnetron sputtering. These high-index, low-loss, rare-earth-doped waveguides are fabricated on silicon substrates and offer the potential for integration with photonic crystal structures for compact optical circuits
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