A study on the orientated growth, microstructure and thermal conductivity of RF reactively sputtered AIN films
In this study AIN films have been deposited by reactive sputtering in argon and nitrogen gas mixture. The orientated growth in the sputtered AIN films has been systematically studied.DOCTOR OF PHILOSOPHY (SME
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Publisher: 'Nanyang Technological University'
DOI identifier: 10.32657/10356/5098
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