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A study on the orientated growth, microstructure and thermal conductivity of RF reactively sputtered AIN films

By Hao Cheng

Abstract

In this study AIN films have been deposited by reactive sputtering in argon and nitrogen gas mixture. The orientated growth in the sputtered AIN films has been systematically studied.DOCTOR OF PHILOSOPHY (SME

Topics: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Publisher: 'Nanyang Technological University'
Year: 2005
DOI identifier: 10.32657/10356/5098
OAI identifier: oai:dr.ntu.edu.sg:10356/5098
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