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PRECISION ION MILLING OF FIELD-ION SPECIMENS

By K.B. ALEXANDER, P. ANGELINI and M.K. MILLER

Abstract

The advantages and disadvantages of a precision ion milling system for the fabrication of field-ion specimens have been examined. This technique may be used on a wide variety of materials. As precise control over the ion beam position is possible, the specimen shape can be sculpted to a desired end form. Repeated ion milling and TEM examination is simplified since the same specimen holder is used for both processes. This technique is ideal for positioning a feature of interest at the specimen apex

Publisher: EDP Sciences
Year: 1989
DOI identifier: 10.1051/jphyscol:1989895/pdf
OAI identifier: oai:edpsciences.org:dkey/10.1051/jphyscol:1989895
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