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Improved MEMS sensors

By Anu Kärkkäinen, Jukka Kyynäräinen, Aarne Oja and Heikki Seppä
Topics: /fi/minedu/virta/publicationtypes/d1, D1 Professional magazine article
Year: 2002
OAI identifier: oai:cris.vtt.fi:publications/e326bf70-eaa2-4f8a-aea7-b975c5a879e6
Provided by: VTT Research System
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