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Thermoelectric bolometers based on heavily doped ultra-thin silicon membranes

By Aapo Varpula, Andrey Timofeev, Andrey Shchepetov, Kestutis Grigoras, Juha Hassel, Jouni Ahopelto, Markku Ylilammi and Mika Prunnila
Topics: /fi/minedu/virta/publicationtypes/b3, B3 Unrefereed Conference Article, /fi/minedu/virta/openaccess/0, 0 Not Open Access, /fi/minedu/virta/scienceareas/213, 213 Electronics, automation, information engineering
Year: 2017
OAI identifier: oai:cris.vtt.fi:publications/acbe9be8-4b6c-4c22-a437-a01a0f3a6297
Provided by: VTT Research System
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