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Shutterless deposition of phosphorous doped microcrystalline silicon by Cat-CVD

By M. Fonrodona, A. Gordijn, M.K. van Veen, C.H.M. van der Werf, J. Bertomeu, J. Andreu and R.E.I. Schropp
Publisher: Elsevier BV
Year: 2003
DOI identifier: 10.1016/s0040-6090(03)00101-9
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Provided by: MUCC (Crossref)
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