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Improved Drive Current in RF Vertical MOSFETS Using Hydrogen Anneal

By M. M. A. Hakim, A. Abuelgasim, L. Tan, C. H. de Groot, W. Redman-White, S. Hall and P. Ashburn
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Year: 2011
DOI identifier: 10.1109/led.2010.2101042
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Provided by: MUCC (Crossref)
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