Article thumbnail

Electron cyclotron resonance plasma source with belt-type magnet assembly and slit antennas

By Huijea Lee, Seong Bong Kim, Changho Yi, Seungil Park, Suk Jae Yoo, Moohyun Cho and Won Namkung
Publisher: IOP Publishing
Year: 2015
DOI identifier: 10.1088/0963-0252/24/1/015031
OAI identifier:
Provided by: MUCC (Crossref)
Download PDF:
Sorry, we are unable to provide the full text but you may find it at the following location(s):
  • http://stacks.iop.org/0963-025... (external link)
  • Suggested articles


    To submit an update or takedown request for this paper, please submit an Update/Correction/Removal Request.