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Electron cyclotron resonance plasma source with belt-type magnet assembly and slit antennas

By Huijea Lee, Seong Bong Kim, Changho Yi, Seungil Park, Suk Jae Yoo, Moohyun Cho and Won Namkung
Publisher: IOP Publishing
Year: 2015
DOI identifier: 10.1088/0963-0252/24/1/015031
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Provided by: MUCC (Crossref)
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