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Electrical properties of atomic layer deposited aluminum oxide on gallium nitride

By Michele Esposto, Sriram Krishnamoorthy, Digbijoy N. Nath, Sanyam Bajaj, Ting-Hsiang Hung and Siddharth Rajan
Publisher: AIP Publishing
Year: 2011
DOI identifier: 10.1063/1.3645616
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Provided by: MUCC (Crossref)
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