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Estimation of the electron beam-induced specimen heating and the emitted X-rays spatial resolution by Kossel microdiffraction in a scanning electron microscope

By Denis Bouscaud, Raphaël Pesci, Sophie Berveiller and Etienne Patoor
Publisher: Elsevier BV
Year: 2012
DOI identifier: 10.1016/j.ultramic.2012.01.018
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Provided by: MUCC (Crossref)
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