Planar Indium Tin Oxide Heater for Improved Thermal Distribution for Metal Oxide Micromachined Gas Sensors

By M. Çakır, Deniz Çalışkan, Bayram Bütün and Ekmel Özbay

Publisher: MDPI AG

Year: 2016

DOI identifier: 10.3390/s16101612

OAI identifier:

Provided by: MUCC (Crossref)

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