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Planar Indium Tin Oxide Heater for Improved Thermal Distribution for Metal Oxide Micromachined Gas Sensors

By M. Çakır, Deniz Çalışkan, Bayram Bütün and Ekmel Özbay
Publisher: MDPI AG
Year: 2016
DOI identifier: 10.3390/s16101612
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Provided by: MUCC (Crossref)
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