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Conductive-AFM topography and current maps simulator for the study of polycrystalline high-k dielectrics

By Carlos Couso, Marc Porti, Javier Martin-Martinez, Vanessa Iglesias, Montserrat Nafria and Xavier Aymerich
Publisher: American Vacuum Society
Year: 2015
DOI identifier: 10.1116/1.4915328
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Provided by: MUCC (Crossref)
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