The Effect of Residual Stress on the Electromechanical Behavior of Electrostatic Microactuators


This work simulates the nonlinear electromechanical behavior of different electrostatic microactuators. It applies the differential quadrature method, Hamilton's principle, and Wilson-θ integration method to derive the equations of motion of electrostatic microactuators and find a solution to these equations. Nonlinear equation difficulties are overcome by using the differential quadrature method. The stresses of electrostatic actuators are determined, and the residual stress effects of electrostatic microactuators are simulated

Similar works

Full text


Directory of Open Access Journals

Provided original full text link
oai:doaj.org/article:40df142eb3a946beb317e139e55e6228Last time updated on 12/18/2014

This paper was published in Directory of Open Access Journals.

Having an issue?

Is data on this page outdated, violates copyrights or anything else? Report the problem now and we will take corresponding actions after reviewing your request.